Intelli-Inspection
Description
Effective use of monitoring and diagnostic solutions, not only to prevent equipment failure for enhancing the capacity and stability, but also to greatly save maintenance costs.
Applications:
Film Thickness Measurement
- Film Thickness Measuring Machine
- Measuring of wafer film Thickness
- Data acquired through TCP/IP port
- Scanning Lot Number and Part Number
- Capture Machine ID, Date and Time stamp
- Only Pass Data is captured
- “NG” Data stored in reject folder
Wafer Thickness Measurement
- Using the Industrial Height Gauge
- Connect to the Serial Port of the Gauge
- Acquired data based on user defined
- Number of points to measure
- Reading acquired automatically and stored
- Data are captured as CSV file
Wafer QR Code Scanning
- Due to the quality of laser etching a handheld QR Code scanner is unable to read the QR Code data
- Using the industrial Camera, with a microscope 40X zoom lens
- Scan data are stored as excel file for quality analysis